The cleanroom, located in the technology building, has a floorspace of approx. 600 sq m. Movable wall partitions divide it into white areas separated by intervening grey rooms. By means of individually controllable filter fan units built into ceiling panels, the cleanroom class for each room can be separately set to any rating from 4 to 7 (as defined in DIN EN ISO 14644).There is an extension to the actual cleanroom, known as the bypack area. The main supplies for compressed air, nitrogen, purified water, cooling water, electricity and vacuum production are kept in this area. It is also from here, that special explosive, self-igniting or poisonous gases are routed to the individual items of equipment. The room also houses the centre’s concentrated chemicals and a wastewater disposal system, with associated neutralisation plant.